9 of 346 municipalities
| Copiapó | Atacama | 176.100 | 17.761 | 10 |
| Vallenar | Atacama | 57.360 | 7.224 | 8 |
| Caldera | Atacama | 19.964 | 3.699 | 5 |
| Tierra Amarilla | Atacama | 14.431 | 11.266 | 1 |
| Diego de Almagro | Atacama | 13.909 | 19.003 | 1 |
| Chañaral | Atacama | 13.017 | 5.764 | 2 |
| Huasco | Atacama | 11.590 | 1.604 | 7 |
| Freirina | Atacama | 7.840 | 3.214 | 2 |
| Alto del Carmen | Atacama | 5.781 | 6.162 | 1 |